The dual-stage extreme ultraviolet (EUV) lithography system is the first in a new generation of machines that will support advanced Logic and Memory chip production.

Explore ASML products and services that optimize the chip-making process, including our advanced lithography machines and metrology tools.

We have the largest ASML manufacturing site in Asia as well as two training centers, play an essential role in the rapidly growing e-beam market, and work closely with TSMC and major semiconductor fabs.

ASML's deep ultraviolet (DUV) lithography systems dive deep into the UV spectrum to print the tiny features that form the basis of the microchip.

Jan 25, 2024 · Learn about the technology behind ASML lithography systems and other products, used to improve the chip-making process and push the industry forward.

In an ASML lithography machine, the stage moves two wafer tables simultaneously, each holding a silicon wafer. While one wafer is being exposed, the position of the other wafer is measured by the …

ASML is one of the world’s leading manufacturers of chip-making equipment. It’s a common misconception that we make chips, also called microchips or integrated circuits (ICs), but we actually …

Combining high productivity, excellent image resolution, matched overlay to EUV NXE and ArFi NXT tools and focus performance, the TWINSCAN NXE:3400C provides lithography capability …

The dual-stage ArF immersion lithography system offers better overlay and imaging performance at higher productivity and with less process complexity.

This takes place at high throughput, because ASML TWINSCAN systems allow for the measurement of wafer characteristics at the metrology position, while another just-measured wafer is being exposed.